Chuck Table

With the help of our specific and brilliantly controlled synthesis process, the permeable ceramic panel or substrate has uniform distribution of pores and uniform size. Completely distributed effect can be achieved by using it in the field of object suction or filtration.

Principal characteristics of Chuck Table:

• Automatic load-unload
• Chuck  table  for  IC  and  LED  wafer  ,glass  dicing ,etc
• Filtration
• Fixed  position
• High  precision screen  printing
• High  precision  stacking
• Object  suction
• The size of the pore can be controlled in the array from sub micrometer to several tenth  micrometers

Either in the application field of filtration or object suction, any size and shape of the panels are accessible. A chuck table for wafer dicing, the dimension of the panel diameter could be 12,8,6 ,5 ,4 ,3  and other dimensions are acquirable. Figure 2 is a square type of chuck table utilized for screen printing or slurry filtration, LED wafer, we can supply the dimension(C) of the panel side by dimensions below 300 mm.